Two-beam interferometry is a tool of high-precision length-metrology, where displacements are measured to within sub-nanometer resolution and accuracy. Differential wavefront sensing - via phase detection by segmented photodiodes - adds the capability of simultaneously measuring the target translation and rotation. This paper gives an analytical model explaining the observation of fake tilts by a combined x-ray and optical interferometer.

Fake tilts in differential wavefront sensing / Massa, Enrico; Sasso, Carlo Paolo; Mana, Giovanni. - In: OPTICS EXPRESS. - ISSN 1094-4087. - 27:24(2019), p. 34505-34518. [10.1364/OE.27.034505]

Fake tilts in differential wavefront sensing

Massa, Enrico;Sasso, Carlo Paolo
;
Mana, Giovanni
2019

Abstract

Two-beam interferometry is a tool of high-precision length-metrology, where displacements are measured to within sub-nanometer resolution and accuracy. Differential wavefront sensing - via phase detection by segmented photodiodes - adds the capability of simultaneously measuring the target translation and rotation. This paper gives an analytical model explaining the observation of fake tilts by a combined x-ray and optical interferometer.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11696/62225
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