Two-beam interferometry is a tool of high-precision length-metrology, where displacements are measured to within sub-nanometer resolution and accuracy. Differential wavefront sensing - via phase detection by segmented photodiodes - adds the capability of simultaneously measuring the target translation and rotation. This paper gives an analytical model explaining the observation of fake tilts by a combined x-ray and optical interferometer.
Fake tilts in differential wavefront sensing / Massa, Enrico; Sasso, Carlo Paolo; Mana, Giovanni. - In: OPTICS EXPRESS. - ISSN 1094-4087. - 27:24(2019), p. 34505-34518. [10.1364/OE.27.034505]
Fake tilts in differential wavefront sensing
Massa, Enrico;Sasso, Carlo Paolo
;Mana, Giovanni
2019
Abstract
Two-beam interferometry is a tool of high-precision length-metrology, where displacements are measured to within sub-nanometer resolution and accuracy. Differential wavefront sensing - via phase detection by segmented photodiodes - adds the capability of simultaneously measuring the target translation and rotation. This paper gives an analytical model explaining the observation of fake tilts by a combined x-ray and optical interferometer.| File | Dimensione | Formato | |
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