Electrostatic MEMS generator/actuator of nanoforces traceable to electrical and mechanical quantities

The precise measurement of small masses—and consequently small forces, in the pico- to micro-Newton (pN–µN) range, is critical across numerous scientific and technological domains, including physics, biology, and materials science. Many existing force sensors operate by measuring the deflection of an elastic structure using deformation-sensitive elements (e.g., piezoresistive or optical sensors). However, such systems often involve non-linear behaviors that are challenging to characterize accurately. To address the need for traceability at these force scales, electrostatic balances—where gravitational and electrostatic forces are equated—have been developed. Building on this principle, we present a micro electro-mechanical system (MEMS)-based generator and actuator capable of producing nano-scale forces, enabling both electrical and mechanical measurements traceable to the International System of Units (SI). This work details the complete development process of the device, encompassing its design, simulation, fabrication, and preliminary metrological characterization.