Flexible and reusable parylene C mask technology for applications in cascade impactor air quality monitoring systems / Vigna, L; Gottschalk, Martin; Cacocciola, N; Verna, A; Marasso, Sl; Seeger, Stefan; Pirri, Cf; Cocuzza, M. - In: MICRO AND NANO ENGINEERING. - ISSN 2590-0072. - (2022). [10.1016/j.mne.2022.100108]
Flexible and reusable parylene C mask technology for applications in cascade impactor air quality monitoring systems
L Vigna
;A Verna;SL Marasso;CF Pirri;M Cocuzza
2022
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