A fractional error as large as 25 pm mm(-1) at the zero optical-path difference has been observed in an optical interferometer measuring the displacement of an x-ray interferometer used to determine the lattice parameter of silicon. Detailed investigations have brought to light that the error was caused by light forward-scattered from the beam feeding the interferometer. This paper reports on the impact of forward-scattered light on the accuracy of two-beam optical interferometry applied to length metrology, and supplies a model capable of explaining the observed error.
|Titolo:||Forward scattering in two-beam laser interferometry|
|Data di pubblicazione:||2018|
|Appare nelle tipologie:||1.1 Articolo in rivista|