Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy with Microradian Range

High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilohertz. In most demanding applications, the actual performance of these instruments needs to be characterized. The best angular measurement instruments available today do not sucient resolution and/or bandwidth to satisfy these needs. At the Istituto Nazionale di Ricerca Metrologica, INRIM a device was designed and built aiming at characterizing precision 2D angular actuators with a resolution surpassing the best devices on the market. The device is based on a multi reflection scheme that allows multiplying the deflection angle by a factor of 70. The ultimate resolution of the device is 2 prad/radq(Hz) over a measurement range of 36 urad with a measurement band >10 kHz. The present work describes the working principle, the practical realization, and a case study on a top-level commercial angular actuator (Nano-MTA2 produced by Mad City Labs).