Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.
Measuring the divergence of laser beams to correct interferometric displacement measurements / Sasso, Carlo Paolo; Palmisano, Carlo; Massa, Enrico; Mana, Giovanni. - (2014), pp. 204-205. [10.1109/CPEM.2014.6898330]
Measuring the divergence of laser beams to correct interferometric displacement measurements
Sasso, Carlo Paolo
;Massa, Enrico;Mana, Giovanni
2014
Abstract
Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.| File | Dimensione | Formato | |
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