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EnglishOwing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.
Measuring the divergence of laser beams to correct interferometric displacement measurements / Sasso, Carlo Paolo; Palmisano, Carlo; Massa, Enrico; Mana, Giovanni. - (2014), pp. 204-205.
| Titolo: | Measuring the divergence of laser beams to correct interferometric displacement measurements | |
| Autori: | ||
| Data di pubblicazione: | 2014 | |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1109/CPEM.2014.6898330 | |
| Abstract: | Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferomet...ry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry. | |
| Full-text (pubblici): | reserved | |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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