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EnglishOwing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.
Measuring the divergence of laser beams to correct interferometric displacement measurements / Sasso, Carlo Paolo; Palmisano, Carlo; Massa, Enrico; Mana, Giovanni. - (2014), pp. 204-205.
| Titolo: | Measuring the divergence of laser beams to correct interferometric displacement measurements |
| Autori: | |
| Data di pubblicazione: | 2014 |
| Citazione: | Measuring the divergence of laser beams to correct interferometric displacement measurements / Sasso, Carlo Paolo; Palmisano, Carlo; Massa, Enrico; Mana, Giovanni. - (2014), pp. 204-205. |
| Abstract: | Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry. |
| Handle: | http://hdl.handle.net/11696/64960 |
| ISBN: | 978-1-4799-2479-0 978-1-4799-5205-2 978-1-4799-2478-3 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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