Method and system for determining the position of an element of an optical system in an assembly for processing or measuring an object, as well as the position of said object relative to said assembly, by parallel interferometric measurements / Donadello, Simone; Previtali, Barbara; Colombo, Daniele. - (2019).
Method and system for determining the position of an element of an optical system in an assembly for processing or measuring an object, as well as the position of said object relative to said assembly, by parallel interferometric measurements
Donadello, Simone;
2019
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