Future measurements of the silicon lattice-parameter by combined X-ray and optical interferometry require displacement measurements having 10 -9 relative accuracy. Experimental and numerical investigations are under way to bring into light the limiting factors, excluding or identifying and eliminating them.

Laser interferometry in the Si lattice-parameter measurement / Massa, E.; Mana, G.. - (2012), pp. 352-353. [10.1109/CPEM.2012.6250947]

Laser interferometry in the Si lattice-parameter measurement

Massa, E.
;
Mana, G.
2012

Abstract

Future measurements of the silicon lattice-parameter by combined X-ray and optical interferometry require displacement measurements having 10 -9 relative accuracy. Experimental and numerical investigations are under way to bring into light the limiting factors, excluding or identifying and eliminating them.
File in questo prodotto:
File Dimensione Formato  
06250947.pdf

non disponibili

Tipologia: Versione editoriale
Licenza: Non Pubblico - Accesso privato/ristretto
Dimensione 227.25 kB
Formato Adobe PDF
227.25 kB Adobe PDF   Visualizza/Apri   Richiedi una copia

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11696/64968
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 0
  • ???jsp.display-item.citation.isi??? ND
social impact