This study focuses on the time stability of different metrological characteristics of quadrupole mass spectrometers (QMSs). Investigated parameters were the sensitivity, when using a Faraday cup as a detector, the peak position, the peak width, the gain of a secondary electron multiplier, and the minimum detectable partial pressure. Eight different commercial QMSs were investigated at seven national metrology institutes under three different nominal calibration pressures of 5 x 10-6 Pa, 5 x 10-5 Pa, and 5 x 10-4 Pa Pa for N2 and He. The measurements were carried out using a periodicity of approximately 3 months for a total duration of 2 years. Sensitivity calibrations were conducted either through a comparison method using calibrated ionization gauges or by applying a primary vacuum calibration system. In the case of ionization gauges, they were periodically recalibrated to ensure their stability and traceability to a primary pressure standard.

Time stability characterization of quadrupole mass spectrometers / Elkatmis, Alper; Kangi, Rifat; Becker, Ute; Jousten, Karl; Mari, Domenico; Boineau, Frederic; Vicar, Martin; Ruiz, Salustiano; Setina, Janez. - In: MEASUREMENT. - ISSN 0263-2241. - 165:(2020), p. 108143. [10.1016/j.measurement.2020.108143]

Time stability characterization of quadrupole mass spectrometers

Mari, Domenico;
2020

Abstract

This study focuses on the time stability of different metrological characteristics of quadrupole mass spectrometers (QMSs). Investigated parameters were the sensitivity, when using a Faraday cup as a detector, the peak position, the peak width, the gain of a secondary electron multiplier, and the minimum detectable partial pressure. Eight different commercial QMSs were investigated at seven national metrology institutes under three different nominal calibration pressures of 5 x 10-6 Pa, 5 x 10-5 Pa, and 5 x 10-4 Pa Pa for N2 and He. The measurements were carried out using a periodicity of approximately 3 months for a total duration of 2 years. Sensitivity calibrations were conducted either through a comparison method using calibrated ionization gauges or by applying a primary vacuum calibration system. In the case of ionization gauges, they were periodically recalibrated to ensure their stability and traceability to a primary pressure standard.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11696/63132
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