In this paper Electrical Resistance Tomography is applied to recover maps of sheet conductance of commercial metal-oxide thin films, chosen as test material. Results are compared to nominal specifications and van der Pauw, four-point probe measurements. It is shown how Electrical Resistance Tomography can measure with good accuracy the nominal conductance value in uniform samples and also identify resistivity inhomogeneities in altered samples. The choice of the reconstruction algorithm is also briefly discussed.
Electrical Resistance Tomography on thin films: Sharp conductive profiles / Cultrera, Alessandro; Callegaro, Luca. - (2015), pp. 297-301. (Intervento presentato al convegno IEEE 1st International Forum on Research and Tecnologies for Society and Industry Leveraging a better tomorrow (RTSI) tenutosi a Torino, Italy nel 16-18 Sept. 2015) [10.1109/RTSI.2015.7325114].
Electrical Resistance Tomography on thin films: Sharp conductive profiles
CULTRERA, ALESSANDRO;Callegaro, Luca
2015
Abstract
In this paper Electrical Resistance Tomography is applied to recover maps of sheet conductance of commercial metal-oxide thin films, chosen as test material. Results are compared to nominal specifications and van der Pauw, four-point probe measurements. It is shown how Electrical Resistance Tomography can measure with good accuracy the nominal conductance value in uniform samples and also identify resistivity inhomogeneities in altered samples. The choice of the reconstruction algorithm is also briefly discussed.| File | Dimensione | Formato | |
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