In this paper Electrical Resistance Tomography is applied to recover maps of sheet conductance of commercial metal-oxide thin films, chosen as test material. Results are compared to nominal specifications and van der Pauw, four-point probe measurements. It is shown how Electrical Resistance Tomography can measure with good accuracy the nominal conductance value in uniform samples and also identify resistivity inhomogeneities in altered samples. The choice of the reconstruction algorithm is also briefly discussed.
|Titolo:||Electrical Resistance Tomography on thin films: Sharp conductive profiles|
|Data di pubblicazione:||2015|
|Appare nelle tipologie:||4.1 Contributo in Atti di convegno|