A new translation device has been developed at the Istituto di Metrologia ''G. Colonnetti'' (IMGC) to improve the measurement of the (220) lattice spacing in silicon by X-ray/optical interferometry, It is capable of millimeter linear displacement and servo controls ensure picometer and nanoradian resolutions in crystal position and attitude, It has been successfully used to drive a scanning X-ray interferometer over a 2 mm displacement, thus extending by more than one order of magnitude the maximum crystal movement obtained before.
Scanning X-ray interferometry over a millimeter baseline / Bergamin, A; Cavagnero, G; Cordiali, L; Mana, Giovanni; Zosi, G.. - In: IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT. - ISSN 0018-9456. - 46:2(1997), pp. 576-579. [10.1109/19.571920]
Scanning X-ray interferometry over a millimeter baseline
MANA, GIOVANNI;
1997
Abstract
A new translation device has been developed at the Istituto di Metrologia ''G. Colonnetti'' (IMGC) to improve the measurement of the (220) lattice spacing in silicon by X-ray/optical interferometry, It is capable of millimeter linear displacement and servo controls ensure picometer and nanoradian resolutions in crystal position and attitude, It has been successfully used to drive a scanning X-ray interferometer over a 2 mm displacement, thus extending by more than one order of magnitude the maximum crystal movement obtained before.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
