PHASE MODULATION IN HIGH-RESOLUTION OPTICAL INTERFEROMETRY

The measurement of nanometre displacements with picometre resolution has been made possible by a phase-modulation recovery scheme applied to an optical Michelson interferometer using polarization encoding. In contrast to conventional schemes, phase modulation is carried out before the interferometer optics. In this way, the low-frequency components of the phase shift between the two interfering beams are locked at zero (within limits set only by shot noise) before beam splitting by a feedback loop driving the modulator. An interferometer prototype, illuminated by a beam thus modulated, was constructed and coupled to an X-ray interferometer to compare the optical and X-ray interferometric measurement values of sub-nanometre displacements. A resolution better than 1 pm over a 100 Hz bandwidth was obtained.