EURAMET Project 866  "Interferometric Calibration of microdisplacement actuators" - Final Report

Picotto, Gianbartolo; Michael, Matus; Emilio, Prieto; Petr, Balling; Petr, Kren; Jan, Hald; Sébastien, Ducourtieux; Roman, Fira; Felix, Meli; Antti, Lassila; Oelof, Kruger; Hugo, Pirée; Tanfer, Yandayan

Precise positioning in nanometrology, scanning probe microscopy, and process control in nanofabrication needs of traceable displacement actuators operating in the micrometric and nanometric ranges of displacements. High sensitivity actuators have usually onboard position sensors in a closed-loop control of displacements. Eleven laboratories from EURAMET and one laboratory from AFRIMETs participated in this “Co-operation in Research” project as a pilot study on interferometric calibration of microdisplacement actuators. Measurements have been performed with homodyne and heterodyne interferometers, various optical and mechanical set-ups, and different orientations (horizontal, vertical up and vertical down) of the actuator. Compensation of the optical non-linearity made mostly use of own methods and associated software tools. Traceable instruments were used to measure temperature and ambient air parameters for air refractivity correction.

EURAMET Project 866 "Interferometric Calibration of microdisplacement actuators" - Final Report / Picotto, Gianbartolo; Matus, Michael; Prieto, Emilio; Balling, Petr; Kren, Petr; Hald, Jan; Ducourtieux, Sébastien; Fira, Roman; Meli, Felix; Lassila, Antti; Kruger, Oelof; Pirée, Hugo; Yandayan, Tanfer. - (2018), pp. 1-3.

Titolo:	EURAMET Project 866 "Interferometric Calibration of microdisplacement actuators" - Final Report
Autori:	PICOTTO, GIANBARTOLO (Corresponding) Michael Matus Emilio Prieto Petr Balling Petr Kren Jan Hald Sébastien Ducourtieux Roman Fira Felix Meli Antti Lassila Oelof Kruger Hugo Pirée Tanfer Yandayan mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2018
Citazione:	EURAMET Project 866 "Interferometric Calibration of microdisplacement actuators" - Final Report / Picotto, Gianbartolo; Matus, Michael; Prieto, Emilio; Balling, Petr; Kren, Petr; Hald, Jan; Ducourtieux, Sébastien; Fira, Roman; Meli, Felix; Lassila, Antti; Kruger, Oelof; Pirée, Hugo; Yandayan, Tanfer. - (2018), pp. 1-3.
Handle:	http://hdl.handle.net/11696/67832
Appare nelle tipologie:	5.12 Altro

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