SIMULTANEOUS 3-AXIS MEMS ACCELEROMETER PRIMARY CALIBRATION: DESCRIPTION OF THE TEST-RIG AND MEASUREMENTS

Nowadays, in the field of vibration monitoring, a relevant increase and diffusion of «low-cost» three-axial accelerometers (e.g. MEMS and NEMS) has been observed. MEMS and NEMS accelerometers, unlike traditional piezoelectric transducers, are generally characterized by medium/low-accuracy. However, in specific context of extensive applications (such as sensor networks), in which neither high accuracy nor detailed resolution on wide range of frequency and amplitude are needed, the technical performance of these accelerometers are considered adequate and satisfactory. The increased demand for calibration of MEMS and NEMS accelerometers and their inherent «low-accuracy», presupposes the opportunity to simplify the traditional calibration of triaxial accelerometers, as stated in Standard ISO 16063-21