THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY
journal00294
E094973
US
0022-5355
English
Rivista
American Institute of Physics:2 Huntington Quadrangle, Suite 1NO1:Melville, NY 11747:(800)344-6902, (631)576-2287, EMAIL: subs@aip.org, INTERNET: http://www.aip.org, Fax: (516)349-9704
1964
1982
false