In order to reduce measurement uncertainty of the (220) lattice spacing of silicon to a few parts per 10(9), a combined X-ray and optical interferometer capable of millimeter scans is being tested. A new series of measurements confirmed the value obtained with our previous set-up, and the bounds of measurement uncertainty were investigated. The article supplements the analysis of the error budget and provides a safer footing for the monocrystalline silicon lattice parameter value.
Scanning X-ray interferometry and the silicon lattice parameter: towards 10(-9) relative uncertainty? / Bergamin, A; Cavagnero, G; Mana, Giovanni; Zosi, G.. - In: THE EUROPEAN PHYSICAL JOURNAL. B, CONDENSED MATTER PHYSICS. - ISSN 1434-6028. - 9:2(1999), pp. 225-232. [10.1007/s100510050760]
Scanning X-ray interferometry and the silicon lattice parameter: towards 10(-9) relative uncertainty?
MANA, GIOVANNI;
1999
Abstract
In order to reduce measurement uncertainty of the (220) lattice spacing of silicon to a few parts per 10(9), a combined X-ray and optical interferometer capable of millimeter scans is being tested. A new series of measurements confirmed the value obtained with our previous set-up, and the bounds of measurement uncertainty were investigated. The article supplements the analysis of the error budget and provides a safer footing for the monocrystalline silicon lattice parameter value.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
